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三氯氢硅中碳含量检测标准

发布时间:2025-01-11 20:49:24 点击数:0
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YS/T 1059-2015

硅外延用三氯氢硅中总碳的测定 气相色谱法

Determination of total carbon content in trichlorosilane for silicon eqitaxy—Gas chromatographic method

  • 【发布单位或类别】 CN-YS行业标准-有色金属
  • 【发布日期】2015-04-30
  • 【CCS分类】H17半金属及半导体材料分析方法
  • 【ICS分类】77.040.30金属材料化学分析

YS/T 1060-2015

硅外延用三氯氢硅中其他氯硅烷含量的测定 气相色谱法

Determination of other chlorosilane in trichlorosilane for silicon eqitaxy—Gas chromatographic method

  • 【发布单位或类别】 CN-YS行业标准-有色金属
  • 【发布日期】2015-04-30
  • 【CCS分类】H17半金属及半导体材料分析方法
  • 【ICS分类】77.040.30金属材料化学分析

20240139-T-469

硅外延用三氯氢硅中杂质含量的测定 电感耦合等离子体质谱法

Test method for measuring contamination of Trichlorosilane for silicon epitaxy Inductively coupled plasma mass sepectrometry

  • 【发布单位或类别】 CN-PLAN国家标准计划
  • 【发布日期】2024-03-25
  • 【CCS分类】半金属及半导体材料分析方法
  • 【ICS分类】77.040金属材料试验

YS/T 987-2014

氯硅烷中碳杂质的测定方法 甲基二氯氢硅的测定

Test method for measuring carbon containing compound in chlorosilane—Determination of methyldichlorosilane

  • 【发布单位或类别】 CN-YS行业标准-有色金属
  • 【发布日期】2014-10-14
  • 【CCS分类】H17无机化工原料综合
  • 【ICS分类】77.040.30金属材料化学分析

DB53/T 500-2013

多晶硅用三氯氢硅组分含量测定 气相色谱法

  • 【发布单位或类别】 CN-DB53云南省地方标准
  • 【发布日期】2013-08-01
  • 【CCS分类】G10无机化工原料综合
  • 【ICS分类】71.040.40化学分析

DB53/T 501-2013

多晶硅用三氯氢硅杂质元素含量测定 电感耦合等离子体质谱法

  • 【发布单位或类别】 CN-DB53云南省地方标准
  • 【发布日期】2013-08-01
  • 【CCS分类】G10化合物半导体材料
  • 【ICS分类】71.040.40化学分析

GB/T 30652-2023

硅外延用三氯氢硅

Trichlorosilane for silicon epitaxial

  • 【发布单位或类别】 CN-GB国家标准
  • 【发布日期】2023-08-06
  • 【CCS分类】H83其他无机化工原料
  • 【ICS分类】29.045半导体材料

GB/T 28654-2018

工业三氯氢硅

Trichlorosilane for industrial use

  • 【发布单位或类别】 CN-GB国家标准
  • 【发布日期】2018-06-07
  • 【CCS分类】G14其他无机化工原料
  • 【ICS分类】71.060.99其他无机化学品

GB/T 28654-2012

工业三氯氢硅

Trichlorosilane for industrial use

  • 【发布单位或类别】 CN-GB国家标准
  • 【发布日期】2012-09-03
  • 【CCS分类】G14化合物半导体材料
  • 【ICS分类】71.060.99其他无机化学品

GB/T 30652-2014

硅外延用三氯氢硅

Trichlorosilane for silicon epitaxial

  • 【发布单位或类别】 CN-GB国家标准
  • 【发布日期】2014-12-31
  • 【CCS分类】H83污染控制技术规范
  • 【ICS分类】29.045半导体材料

HG/T 4683-2014

三氯氢硅泄漏的处理处置方法

Treatment and disposal method for trichlorosilane spill

  • 【发布单位或类别】 CN-HG行业标准-化工
  • 【发布日期】2014-07-09
  • 【CCS分类】Z05无机化工原料综合
  • 【ICS分类】13.030.20液态废物、淤泥

DB53/T 499-2013

多晶硅用三氯氢硅

  • 【发布单位或类别】 CN-DB53云南省地方标准
  • 【发布日期】2013-08-01
  • 【CCS分类】G10电子技术专用材料
  • 【ICS分类】71.060.99其他无机化学品

GB/T 29056-2012

硅外延用三氯氢硅化学分析方法 硼、铝、磷、钒、铬、锰、铁、钴、镍、铜、钼、砷和锑量的测定 电感耦合等离子体质谱法

Trichlorosilane for silicon epitaxy - Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,molybdenum,arsenic and antimony content - Inductively coupled plasma mass spectrometric method

  • 【发布单位或类别】 CN-GB国家标准
  • 【发布日期】2012-12-31
  • 【CCS分类】L90金属化学分析方法
  • 【ICS分类】77.120有色金属

T/QGCML 1421-2023

四氯化硅转化三氯氢硅铜基氢化催化剂 制备工艺规范

  • 【发布单位或类别】 CN-TUANTI团体标准
  • 【发布日期】2023-09-18
  • 【CCS分类】卫生
  • 【ICS分类】71.100.40表面活性剂及其他助剂

\u0413\u041e\u0421\u0422 26239.6-84

Кремний четыреххлористый. Метод определения дихлорсилана, трихлорсилана, тетрахлорида кремния, 1,3,3,3-тетрахлордисилоксана, 1,1,3,3-тетрахлордисилоксана, пентахлордисилоксана, гексахлордисилоксана, гексахлордисилана

Silicon tetrachloride. Method of dichlorsilane, trichlorsilane, silicon tetrachloride, 1,3,3,3-tetrachlordisiloxane, 1,1,3,3-tetrachlordisilane, pentachlordisiloxane, hexachlordisiloxane, hexaclordisilane determination

  • 【发布单位或类别】 RU-GOST俄罗斯国家标准
  • 【发布日期】
  • 【CCS分类】H10/19卫生
  • 【ICS分类】29.045半导体材料

31999D0058

1999/58/EC: Commission Decision of 11 January 1999 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1999, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to 3

1999/58/EC: Commission Decision of 11 January 1999 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1999, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to 3

  • 【发布单位或类别】 IX-EURLEX欧洲技术法规
  • 【发布日期】1999-01-11
  • 【CCS分类】C50/64食品综合
  • 【ICS分类】75.200石油、石油产品和天然气储运设备

31999D0058R(01)

Corrigendum to Commission Decision 1999/58/EC of 11 January 1999 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1_+trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1999, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period

Corrigendum to Commission Decision 1999/58/EC of 11 January 1999 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1_+trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1999, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period

  • 【发布单位或类别】 IX-EURLEX欧洲技术法规
  • 【发布日期】1999-02-10
  • 【CCS分类】C50/64卫生
  • 【ICS分类】75.200石油、石油产品和天然气储运设备

32000D0379

2000/379/EC: Commission Decision of 14 December 1999 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 2000 and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to

2000/379/EC: Commission Decision of 14 December 1999 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 2000 and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to

  • 【发布单位或类别】 IX-EURLEX欧洲技术法规
  • 【发布日期】1999-12-14
  • 【CCS分类】X00/09卫生
  • 【ICS分类】13.030废物

31997D0461

97/461/EC: Commission Decision of 27 June 1997 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1997, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to 31 De

97/461/EC: Commission Decision of 27 June 1997 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1997, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to 31 De

  • 【发布单位或类别】 IX-EURLEX欧洲技术法规
  • 【发布日期】1997-06-27
  • 【CCS分类】C50/64
  • 【ICS分类】91.140建筑物中的设施

31998D0027

98/27/EC: Commission Decision of 16 December 1997 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1998, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to 31

98/27/EC: Commission Decision of 16 December 1997 allocating import quotas for the fully halogenated chlorofluorocarbons 11, 12, 113, 114 and 115, other fully halogenated chlorofluorocarbons, halons, carbon tetrachloride, 1,1,1-trichloroethane, hydrobromofluorocarbons and methyl bromide for the period 1 January to 31 December 1998, and in addition, allocating placing on the market quotas for hydrochlorofluorocarbons for the period 1 January to 31

  • 【发布单位或类别】 IX-EURLEX欧洲技术法规
  • 【发布日期】1997-12-16
  • 【CCS分类】C50/64
  • 【ICS分类】75.080石油产品综合

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