GB/T 38867-2020
Silicon tetrachloride for electronic industry
HG/T 5745-2020
DB53/T 619-2014
YS/T 1195-2017
Silicon tetrachloride-By-product of polysilicon
DB63/T 1611-2017
T/CNIA 0061-2020
DB63/T 1610-2017
HG/T 5743\uff5e5746-2020
T/CEMIA 001-2017
T/CEMIA 014-2018
SJ 2594-1985
Method for the analysis of boron and metalic impurities in pure SiC14-Spectro-chemical method
T/FSI 003-2016
T/CEMIA 015-2018
T/QGCML 1421-2023
\u0413\u041e\u0421\u0422 26239.6-84
Silicon tetrachloride. Method of dichlorsilane, trichlorsilane, silicon tetrachloride, 1,3,3,3-tetrachlordisiloxane, 1,1,3,3-tetrachlordisilane, pentachlordisiloxane, hexachlordisiloxane, hexaclordisilane determination
\u0413\u041e\u0421\u0422 26239.8-84
Semiconductor silicon and raw materials for its production. Method of dichlorsilane, trichlorsilane and silicon tetrachloride determination